摘要
四极质谱计是一种很有用的残气分析工具,一般情况下它只能分析残气成分,本文给出通过四极质谱谱图对比定性分析残气成分的实例。
Quadrupole mass spectrometer (QMS) is a very useful tool for analyzing components of residual gas in vacuum system. Generally, it is suitable for qualitative analysis only. This paper gives an example on how to qualitatively determine components of residual gas by comparing QMS spectra.
出处
《真空电子技术》
2003年第5期35-38,共4页
Vacuum Electronics
关键词
四极质谱计
残气成分
质谱
Quadrupole mass spectrometer
Components of residual gas
Mass spectroscopy
