摘要
对主要成分为Zr和Co的新型非蒸散消气剂进行了活化温度及吸气性能的实验研究。实验表明其活化温度为200～250℃,对N2,H2等活性气体有很好的抽速,对惰性气体He等无抽速。
The activation temperature and sorption characteristics of a new nonevaporable getter material with predominant components Zr and Co are studied by the experiments. It is shown that the activation temperature of this new getter is 200～250 ℃.It has a high pumping speed to the active gases, such as N2,H2 and no pumping speed to He and other inert gases.
出处
《真空电子技术》
2003年第5期46-48,共3页
Vacuum Electronics
关键词
新型非蒸散消气剂
激活温度
吸气性能
New nonevaporable getter
Activation temperature
Sorption characteristics
