类金刚石碳膜的研究进展

Research Progress of Diamond-like Carbon Films

从类金刚石碳膜作为耐磨薄膜的角度出发 ,综述了近年来类金刚石碳膜 (DLC)结构、沉积技术、沉积机理和性能方面的相关研究进展。介绍了DLC的相结构、过滤阴极真空弧 (FCVA)、类金刚石碳膜的沉积机理及主要工艺影响因素 ,同时指出了存在的问题及研究发展趋势。

With consideration of the tribological behaviors of Diamond-like Carbon Films (DLC),the related research progress of the structures,deposition process,deposition mechanisms and performances of Diamond-like Carbon Films in recent years was reviewed.For the film component and structure respect,DLC phase structure was introduced;for the deposition process,the filtered cathodic vacuum arc (FCVA) was introduced and DLC deposition mechanism was illuminated;for the performance aspect,the main process parameters were discussed;finally,the further study tendency was pointed out.