高能量密度脉冲等离子枪在硬质合金刀具上沉积高硬耐磨涂层研究

Study on Hard and Wear-resistant Coatings onto Cemented Carbide Cutting Tools by Pulsed High Energy Density Plasma

用高能量密度脉冲等离子体枪,于室温下在硬质合金刀具基体上分别成功沉积了硬度高、耐磨损、膜基结合力强的TiN、TiCN和TiAlN薄膜。在优化的工艺条件下,所得TiN、TiCN、TiAlN薄膜纳米硬度分别可达27 GPa、50 GPa和 38 GPa;杨氏模量分别可达 450 GPa、550 GPa、650 GPa。纳米划痕实验临界载荷分别达 90 mN、110 mN和100 mN以上。切削实验表明,涂层刀具可用于高速切削,刀具后面磨损明显减小。刀具力学性能的改善归因于更优异力学性能涂层的沉积、良好的膜基结合力以及徐层特殊的显微结构。

Hard and wear-resistant TiN, TiCN and TiAlN coatings were deposited onto cemented carbide cutting tools at ambient temperature by a newly developed technique, pulsed high energy density plasma technique. Under optimum conditions, the maximum nanohardness of the as-deposited TiN, TiCN and TiAlN coatings may reach at 27 GPa, 50 GPa and 38 GPa, respectively; the maximum Young's modulus may reached at 450 GPa, 550 GPa and 650 GPa, respectively; the maximum critical loads measured by nanoscratch tests were more than 90 mN, 110 mN and 100 mN, respectively. Compared with the uncoated cemented carbide cutting tools, the flank wears of the tools coated with TiN, TiCN and TiAlN were reduced dramatically, when the tools were applied in turning hardened CrWMn steel under industrial conditions, due to the deposition of TiN, TiCN and TiAlN coatings.