微电子领域磁悬浮进给机构设计

The Design of a Magnetic Suspended Feeder in the Field of Microelectronic Manufacturing

设计了一种集磁悬浮技术和线性驱动技术为一体的微电子设备用进给机构。此机构采用直线同步电机,对悬浮的平台进给机构提供驱动力,实现了平台进给机构在水平和垂直两方向的无接触支撑和导向。文中对磁悬浮平台进给机构产生的悬浮力和直线电机产生的推力进行了分析计算。此进给机构具有响应速度快、刚度高以及定位精确的特点,能够满足微电子设备高精度、高效率和超洁净加工的需要。

A new precision positioning stage is designed with the adoption of both magnetic suspension and linear drive technology which employs a linear synchronous motor as to avoid friction, elastic distortion, hysteresis and non-linear errors. The mechanism can achieve non-contact support and guidance in the horizontal and vertical directions. The magnetic suspension force and the thrusting force produced by the linear motor were analyzed and calculated. The application of linear drive technology in the driving mechanism makes the system can respond quickly and be positioned accurately. With the characteristics of high stiffness, quick response and precise positioning, the driving mechanism can meet the needs of high accuracy and high efficiency under super-clean conditions in the field of micro-electronic manufacturing.