基于3D化学成型技术的太赫兹器件加工

Fabrication Method for Terahertz Device Based on 3D Chemic Prototyping Technology

随着工作频率的提高,微波器件的尺寸逐渐减小,特别是在太赫兹频段,很多尺寸精度已经突破传统机械加工设备的极限。本文利用3D化学成型技术,加工太赫兹器件中关键零件。以定向耦合器为例,进行了设计和制造。定向耦合器在325GHz到500GHz频率范围内,直通插入损耗约3d B,耦合度为20d B。这表明3D化学成型技术在太赫兹器件加工中具有很好的应用前景。

. Dimensional size of microwave device decreases with the working frequency increasing. Some dimensional precisions of key parts have surpassed the ultimate bearing capacity of using usual machining methods in terahertz wave regime. Key parts of THz devices are fabricated by 3D chemic prototyping process in this paper. Design and manufacture of directional couplers are taken for example. In frequency range from 325 GHz to 500 GHz, the insertion loss of input port is 3d B and the coupling factor is 20 d B.The results show that 3D chemic prototyping process has an extensive application prospect in the field of THz devices fabrication.