基于硅MEMS工艺的窄带带通滤波器的设计

Design of the Narrow-Band Bandpass Filters Based on the Sillion MEMS Technology

微波带通滤波器是微波通信系统中的关键器件。本文设计了一种利用硅MEMS腔体技术制作的微波窄带带通滤波器。采用交指结构四分之一波长短路谐振器级联结构,利用电磁场仿真设计软件HFSS进行了设计、建模、仿真和优化,得到了一款具有小型化、高抑制度、低插损、好的电磁屏蔽且易于集成等优点的硅MEMS腔体带通滤波器。

Microwave bandpass filters are the key devices in microwave communication systems.In this paper, a narrow band bandpass filter based on the sillion MEMS cavity technology is proposed.The microwave bandpass filter consisting of the cascaded resonators with the 1/4 wave length interdigital structure was designed, modeled, simulated and optimized by the electromagnetic field simulation and design software.The bandpass filter proposed has many advantages such as compact, high suppression degree, low loss, good EMI shielding and being easily integrated.