基于MEMS技术的太赫兹可调波导带阻滤波器

Terahertz Tunable Waveguide Bandstop Filter with MEMS Technology

本文提出了一种基于双层弯曲热微执行器的新颖的调谐方式,太赫兹带阻滤波器采用波导加载金属块的形式。双层弯曲热微执行器驱动金属膜片移动,利用可动金属膜片改变波导中加载金属块周围的电磁场分布达到调谐的目的。设计了一款中心频率为275.1 GHz的可调带阻滤波器,仿真结果显示,双层弯曲热微执行器产生180μm位移时,滤波器实现了中心频率23.2 GHz的调谐范围,反射衰减由24.7 d B变化到15.9 d B。

This paper presents a novel terahertz waveguide bandstop filter, based on Bimorph microactuator, by loading metal block. The movable metal film driven by Bimorph microactuator can perturb the electromagnetic distribution around the metal block loaded in the waveguide and change its resonance frequency. The designed tunable waveguide bandstop filter operating at 275.1 GHz achieves a tuning range about 23.2 GHz, when the Bimorph microactuator provides a continuous displacement of 180 μm, with the reflection attenuation varying from 24.7 d B to 15.9 d B.