半导体差压传感器的应用研究

An Application Study of Semiconductor Sensor for Low Difference Pressure

本文主要叙述利用力敏式半导体差压传感器灵敏度高的特点,检测弯管流量计的微差压信号。信号的采集,效字信号的处理,流量的计算和显示打印,采用MCS-51系列单片机,并提供了较详细的软件框图。由于半导体材料的压敏效应和热敏效应产生的测量误差,文中通过理论分析和实验数据的分析整理,从硬件和软件中采取了有效的补偿措施。通过实际应用表明,整个流量测量系统具有较高的测量准确度。

This article presents the measurement of low difference pressure in an elbow flowmeter with a semiconductor sensor, The data acquisition, processing, flow-rate computation, display and printing are performed with an MCS-51 processor system. Methods for eliminating the errer caused by the thermal effect and static pressure effect of the semiconductor sensor are ex■l■ined. This system reatures high accuracy which is approved by laboratory test.