摘要
介绍一种基于MEMS技术的倾角传感器SCA103T的基本工作原理,利用MSC1214单片机通过硬件电路设计,结合软件补偿的办法实现的数字式倾角传感器可适用于±30°的大角度测量。实验表明其非线性度<1FS%,零点输出<0.05°;零位电压<5mv;零点漂移<0.02°/h。
Introduce the working principle of SCA103T Angle sensor,it is based on MEMS technology. Through the hardware circuit design by using the MSC1214 microcontroller,combined with software compensation method to achieve digital Angle sensor can be applied to ±30° Angle measurement. Experiments show that the nonlinearity<1FS%,Zero output < 0.05° ;Zero voltage < 5 mv ;Zero drift < 0.02 ° / h.
出处
《电子测试》
2013年第5S期3-4,9,共3页
Electronic Test
