用于月基极紫外(EUV)多层膜样片反射率测量的小型真空试验台

The small scaled vacuum tester for measuring the reflectivity of the lunar based EUV multilayer films sample

用于探月二期工程的极紫外相机采用多层膜反射镜作为光学元件,多层膜反射镜整镜镀膜之前需进行样片镀膜并检测从而完善并确定镀膜工艺。本文介绍了搭建的一台样片反射率测量的小型真空试验台。该试验台由激光等离子体(LPP)光源系统、Mcpherson247单色仪、真空样品室探测系统、数据采集及处理系统组成。工作波段为1～120nm,光谱辐射稳定性好于±1%/h,角分辨率误差为0.015°。用本实验台对多层膜样片进行不同波长反射率测量,测量入射角一定时对不同波长的反射率曲线,根据测量结果完善多层膜镀膜工艺。

The EUV camera optics element of the two phase of lunar exploration will be used the multilayer films reflector,For perfecting and confirming the technics of plating multilayer films reflector,we need plate and measure the multilayer films sample before plating it.The text introduced a small scaled vacuum tester used for measuring the reflectivity of the multilayer films sample. The tester composed of a laser produced plasma sourc,a Mcpherson247 monochromator with a constant deviation angle,vacuum sample room, data collection and disposal system.The working wavelength is from 1 to 120 nm,the stability of spectral radiance is better than ±1%/h,the error of angular resolution is 0.015° .We use the small scaled vacuum tester to measure the reflectivity of the different wavelength of the multilayer films sample. On the fixed angle of incidence,we measure the reflectivity curve of different wavelength. On the basis of the measuring result we can perfect the technics of plating multilayer films reflector.