摘要
提出采用超薄银薄膜和具有陷光结构的薄TCO薄膜组成的复合膜层作为薄膜太阳能电池前电极,有效利用了超薄银膜的高电导性、高透过性,并解决了单银膜无法制作陷光结构以及在产业化生产过程中存在的激光选择性刻划问题。实验采用直流磁控溅射法在9个不同厚度的Sn O2:F薄膜导电玻璃上制备方阻为3/,透过率为89%,厚度为10-15nm的超薄银膜构成前电极,并采用相同的工艺制作成单节的非晶硅薄膜太阳能电池组件,结果表明,方阻为80/的Sn O2:F薄膜与超薄银膜构成的前电极能获得最佳的非晶硅薄膜太阳能电池输出性能,相比于普通的非晶硅薄膜太阳能电池输出功率提升了4%。
An Ag/TCO tandem film are used as front electrode of thin film solar cells, which are composed of super thin Ag film and a textured thin TCO film. This Ag/TCO tandem film has the advantage of high transparency and high conductivity of super thin Ag film. Meanwhile, it solved the laser scribing problems when use Ag film as front electrode in the industry manufacturing processes of thin film solar cells. In experimental, 9 glasses with different thickness SnO2:F film on it are deposited 3/, optical transparent 89%, thickness in 10-15nm super thin Ag film with DC magnet sputtering technology. And these samples are manufactured as a-Si thin film solar panels in same processes. The result shows that when the SnO2:F film have a 80/ sheet resistance it could get the best performance in a-Si solar cells with 4% increase in output power than traditional a-Si solar cells.
出处
《电子测试》
2015年第7X期1-5,共5页
Electronic Test
基金
国家自然科学基金
项目批准号51472096
