溶胶-凝胶法制备氧化钨薄膜的研究

Study on Preparation of tungsten oxide thin films by sol gel method

本文以钨酸盐为原料利用溶胶凝胶法,在陶瓷衬底制备WO3敏感薄膜,于500℃退火。接着对制备好的薄膜进行X射线衍射与电子显微测试,观察到薄膜表面呈较规则的纳米多孔结构。接着对NO2、H2、乙醇等气体进行敏感测试,测试证明薄膜对H2、乙醇敏感性较差,对NO2敏感性良好。

H The WO3 thin film was prepared on ceramic substrate by sol-gel method using sodium tungstate as raw material,and then be annealed at 500℃.The structure and morphology of WO3 were characterized by X-ray diffraction(XRD)and scanning electron microscopy(SEM).The results showed that the film surface travels as nano-porous structure.And then,the gas sensing properties of WO3 thin film to NO2, H2 and alcohol were also researched.WO3 showed a better sensitivity to NO2 than to H2 and alcohol.