基于激光准直直线度测量方法的研究

Study on straightness measurement method based on laser collimation

介绍了用半导体激光器、单模光纤准直激光束作为测量基准轴线,四象限光电器件作为位置传感器,并由单片机进行数据采集、处理与测量结果显示的直线度准直仪。通过稳定性实验、重复特性实验和双频干涉仪比对实验,验证了本直线度测量系统的可行性。实验结果表明,测量系统实现的测量精度为(1.0+2×L)μm(L为准直距离,单位为m),测量范围为10m。

A simultaneous measuring twodimensions straightness collimation tester is developed in which the aligned laser beam based on semiconductor and singlemode fiber is used as the measuring datum axis, fourquadrants detector is used as the position sensor, a chip microcomputer is used for data acquisition and processing. The experiments on the measurement system's stability, repeatability and its comparison with the doublefrequency laser interferometer are carried out. The results of the experiments show that the accuracy of the system is about (1.0+2×L)μm (L is the collimation length,unit is meter). The measuring range is 10 meter.