摘要
光学系统在载荷的作用下会发生变形。基于干涉检验理论,提出了一种先调整后再拟合的处理方法。首先利用下山法计算光学镜面在法线方向的变形;然后利用Zernike多项式拟合变形曲面得到Zernike系数;最后去除刚体位移,作等高线图。新的数据处理方法可以更好的与干涉检验保持一致。对某相机的主镜进行仿真试验,结果表明,下山法计算效率较高,先调整后再拟合的处理结果与干涉检验结果的一致性较好。
Optical system is deformed under load. A new method based on the theory of interference test is presented. A fitting method after alignment is proposed. Firstly, the normal surface error is computed by means of downhill algorithm; secondly, the surface error is fitted at terms of Zernike polynomials, and the Zernike coefficients are attained; finally, contour without the rigid body displacement is processed. The result of new method corresponds to that of interference test. It is shown that downhill algorithm is efficient, and the expected result is gotten by the new method.
出处
《光学技术》
CAS
CSCD
2003年第6期752-753,756,共3页
Optical Technique
