微纳米覆盖层材料的力学性能表征探讨

Discussion about representation of mechanical properties of micro/nano covering materials

使用Agilent公司G200微/纳米压痕仪对多种微纳米覆盖层材料的力学性能进行了测量。结果表明,通过连续刚度法测量微纳米涂层材料,可以获得涂层硬度和弹性模量,并能得到涂层硬度或弹性模量随厚度的变化规律;通过试验也可以看到,纳米压痕法测量膜材的力学性能存在明显的表面效应;基材对膜材的力学性能没有影响;膜材厚度越大,同一深度测得的膜材的弹性模量越高。

Mechanical properties of various covering materials were measured using G200 micro/nano indenter made by Agilent company,USA. It was indicated that hardness and Young’s modulus of the coating and their changes with thickness of the coating could be accurately measured by means of continuous stiffness measurement. It was further shown by experimental results that there was a surface effect while measuring mechanical properties of the coatings by means of nano indentation;there was almost no effect of the base material on mechanical properties of the coating;Young’s modulus of the coating increased with the thickness of the coating raised at the same deepness.