摘要
自制了金属真空系统,阐述了温差电偶真空计校准实验装置的工作原理,给出了静态膨胀法校准温差电偶真空计的测试方法.在低真空度时金属真空系统表面放气不显著,适用于真空实验教学.
A metal vacuum system was made up ,the principle of the experimental apparatus for thermocouple vacuum gauge calibration was elaborated ,and the calibration process with static expan‐sion method was given .The experimental result indicated that the self‐made metal vacuum system was suitable for experiment teaching because of its low outgassing .
出处
《物理实验》
2016年第1期6-8,20,共4页
Physics Experimentation
关键词
真空系统
温差电偶真空计
校准
静态膨胀法
vacuum system
thermocouple vacuum gauge
calibration
static expansion method
