溶胶-凝胶法制备声表面波器件用Li∶ZnO薄膜

SOL-GEL PREPARATION OF Li∶ZnO FILMS FOR SURFACE ACOUSTIC WAVE DEVICES

用溶胶凝胶法在玻璃载玻片上制备Li∶ZnO薄膜 ,涂膜采用旋涂法。薄膜通过二次涂膜而形成。用X射线衍射、原子力显微镜、扫描电镜和电阻仪表征和测量了薄膜的特性和性能。实验结果表明 :通过改变每层涂膜热处理的温度 ,可使Li∶ZnO薄膜具有更好的c轴择优取向性、平整均匀、颗粒细小和高的薄膜电阻率 (≈ 10 7Ω·cm) ,这些性能可满足声表面波器件的使用要求。薄膜形成时每层采用不同成膜热处理温度可使薄膜有较好性能 。

Li∶ZnO films on glass sheets were prepared by solgel technique with a two-step heating process. The results of XRD, SEM,AFM and electrical resistance measurement indicate that the Li∶ZnO films with different heating temperatures per layer are characterized by a good c-orientation, smooth and homogeneous surface, dense and small particles and high resistivity (≈10 7Ω·cm). All these properties show that the films can meet the requirements for surface acoustic wave devices. The better properties of the films obtained by the present technique are due to an optimized film microstructure got from the technique.