单晶硅太阳电池纳米减反射膜的研究

The Experimental Study on Nan ometer Antireflection Coating Used in Single Crystalline Silicon Solar Cells

报道了用热喷涂工艺制备单晶硅太阳电池纳米减反射膜的研究结果 ,讨论了衬底温度对 Ti Ox 纳米减反射膜结构及折射率的影响 ,优化了热喷涂的工艺条件 ,并研究了 Ti Ox 纳米减反射膜对单体太阳电池效率的贡献。实验证明 ,用热喷涂工艺制备的纳米 Ti Ox 减反射膜可使 1 0 0 mm× 1 0 0 mm单体太阳电池的平均光电转换效率增加 8%～ 9%。

This paper repor t s some investigation results about nanom eter antireflection coating prepared by spraying method. The influence of temper ature on structure and refractive index of nanometer TiO x is discussed. The p rocess of nanometer TiO x antireflecti on coating has been optimized for applic ation to commercial silicon photovoltaic cells. The experiments proved that the average of solar cells efficiency has be en raised by 8%～9% with the nanometer Ti O x antireflection coating.