小型非球面轮廓测量仪的原理及应用

Principle and application of miniature aspheric surface profilometer

介绍了自行研制的FLY I非球面轮廓仪的设计以及测量软件数学模型,其实用精度为1～2μm。光学元件的抛光精度取决于精磨精度,本实验室现有的LOH高精度铣磨机床经过对第1次精磨后的光学元件面形进行修正,2次精磨后其精磨精度可达到2μm。研究了这一非球面轮廓仪以配合LOH铣磨机床,测量得到1次精磨后的面形误差数据,经过误差反馈进行2次精磨,以保证光学元件的精磨精度。通过多次实验以及数据处理、分析,证明自行设计、装调的非球面轮廓仪达到了设计的精度要求,可满足实验室,光学加工车间对小型非球面精磨阶段面形的检测要求,即精磨面形误差在2μm以内,同时也可直接用于中低精度非球面光学元件的最终检测。

A miniature aspheric surface profilometer with a usable accuracy of 1～2 μm was designed and assembled to compensate the LOH SPHEROMATIC 50SL in our lab to ensure the grinding precision of optics. Experiments and analyses proved that the miniature aspheric surface profilometer meets the testing requirements of laboratory and optical shop for surface finishing, and it is suitable for final testing of optical elements with medium and low accuracy requirements.