CCD等厚干涉实验仪的研究

Study of CCD Equal-Thickness Interferometer

采用显微光学系统取代读数显微镜,构成新型的CCD等厚干涉实验仪。通过计算机图像处理技术来补偿因视场扩大带来的条纹分辨率降低的影响。实验测试比较显示,CCD等厚干涉实验仪具有实验观察效果好和采集数据更方便的优点。

JXD1 microscope is replaced by CCD micrographic optical system, with that a new type CCD equalthickness interferomenter is composed. The reduction of the resolving power for the micrographs, caused by the enlarged visual field, can be compensated by image processing. The contrasting experiment shows that CCD equalthickness interferometer has strong points of good observable effect and more conveniently collecting data.