波长色散X射线荧光分析的新发展

Development of Wavelength Dispersive X-Ray Fluorescence Analysis

除了继续发展波长色散X射线荧光分析装置在主、次量元素分析上高精度、高稳定性的固有特点之外,进一步提高灵敏度,使分析范围扩展到痕量分析;开拓微区面分布的元素成像分析;进一步对传统分析困难的轻元素和中、重金属元素的探讨,开发新的高级次谱线分析方法;适应新材料特别是纳米材料的分析要求,对薄膜分析的开拓等方面,已经有了长足的发展。在介绍商品化的分析装置方面的发展状况的同时,对无标样分析的基本参数法目前发展状况也做了介绍。

The development of wavelength dispersive Xray fluorescence (WDXRF) analysis is presented in this paper. Except the continuous development of WDXRF in features of high precision and stability for major and minor component analysis, the new efforts have been focused on the realization of the trace analysis by improving of the detection limits of the elements, development in the establishing of new high order spectrum analysis methods, the progress in microarea elemental distribution image analysis and the new development in thin film analysis etc. Other than developments of the WDXRF instruments, the new calibration strategies for quantitative analysis without standard samples, such as fundamental parameter (FP) method, are also briefly introduced.