摘要
用扫描探针显微镜(SPM)技术观察三维表面形态,可以达到纳米级甚至原子量级的分辨率,所以SPM技术在计量方面有着广阔的应用前景。20年来,人们采用各种理论和方法来提高SPM的精度和稳定性,以适应表面计量领域不断提出的新要求。本文在总结表面规范与建模、高分辨率和高时间稳定性测量、图像解释与表面重建、SPM误差和校准以及纳米对准技术等研究结果的基础上,对今后发展的趋势作了展望。
SPM techniques show great potential in metrology because three-dimensional topographic features with nanometer even atomic resolution can be achieved. During the last two decades,various theories and techniques have been developed to improve accuracy and stability of SPMs to meet the increasing requirements in surface nanometrology. We highlight some research results such as surface specifications and modeling,high resolution and high time-stability measurement,image interpretation and surface reconstruction,SPM errors and calibration,nanopositiong techniques. Some technical trends are also covered.
出处
《微纳电子技术》
CAS
2004年第1期1-9,25,共10页
Micronanoelectronic Technology
基金
国家自然科学基金支持项目(50275140)
中国-西班牙合作支持项目(2002-2004)
