CMOS技术在生物传感器中的应用

CMOS technology for biosensor application

介绍了应用传统CMOS工艺实现ISFET的设计方法,比较了四种不同结构ISFET的传输特性,提出了应用同一CMOS工艺实现衔接电路的差分结构形式,并通过实验验证了此电路设计的合理性。传感单元ISFET与衔接电路可整体集成于同一芯片,提高了生物传感器的品质。

The design and fabrication of ISFET-based structure realized in an unmodified commercial CMOS technology are given. The transfer characteristics of four different ISFET are compared. A differential interface circuit is reported and realized in the same CMOS technology. The interface circuit can be monolithically intergrated on a chip with two ISFET,which greatly improves the quality of biomedical sensors.