摘要
对激光三角测量法应用于表面形貌的检测进行研究.通过分析激光三角测量的基本原理,得出光路设计条件与输入输出关系.分析了几种激光三角测量的改进方法的优点、局限与适用范围.讨论了激光三角测量中影响分辨率与精度的几个因素并提出应对的措施.
Research has been done on the measurement of surface profile using the laser triangulation method. By analyzing the basic fundamental of laser triangulation method, the requirement of optical circuit design and the I/O relation are presented. Through comparing several improvements of laser triangulation method, the advantages, limitation and scope of application are proposed respectively. Various factors which affect the measurement resolution and accuracy are discussed, and then the corresponding settlements are put forward.
出处
《厦门大学学报（自然科学版）》
CAS
CSCD
北大核心
2004年第1期50-53,共4页
Journal of Xiamen University：Natural Science
基金
数字化制造技术支持与服务(2002H102)资助
关键词
激光三角法
测量
表面形貌
非接触测量
laser triangulation measurement
non-contact measurement
surface profile
