摘要
综述了(Ba_(1-x)Sr_x)TiO_3(BST)薄膜材料的研究现状,包括薄膜的制备技术、电极材料的选择、组分与掺杂对电学及介电性能的影响,分析了与薄膜相关的缺陷和可靠性现象,并对未来可能的进展作了简单的描述。
This paper reviews progress in research on BST films ,including thin film deposition techniques, the effects of film composition and doping and the choice of electrode material on the electrical and dielectric characteristics of films,and analyzes the defect and reliability phenomena associated with films. In addition,possible future developments are briefly summarized.
出处
《材料导报》
EI
CAS
CSCD
2003年第7期39-42,共4页
Materials Reports
基金
湖北省科技厅资助项目(项目编号:2002AA101B05)
