摘要
基于硅的VLSI设计和制造技术在取得极大进展的同时面临纳米新材料新工艺的挑战,世界各大公司相继开发成功纳米晶体管和纳米器件制造工艺。可以说,模拟电路的设计和制造在电子学领域起着举足轻重的作用,它是大系统前端和后端信号处理和转换的关键部件。
VLSI technology based on silicon has made important progress but it also faces thechallenge of new nano material and nano technology. Nano transisitor and nano fabrication pro-cesses have been successfully developed by some companies in this field in the world.At the sametime, the design and fabrication of analog circuits also play a crucial rule in the electronics areas,they are the key components in the front and back end of signal process and transfer systems.
出处
《半导体技术》
CAS
CSCD
北大核心
2004年第1期8-11,26,共5页
Semiconductor Technology