纳机电探针阵列与压阻式传感器集成技术研究

Study on the nano electromechanical systems(NEMS) electro-thermal probe array integrated with piezoresistive sensor

给出了纳机电探针阵列与压阻式传感器集成一维阵列器件结构及工作原理;通过理论计算得到该结构的一些主要的特性参数,计算结果与ANSYS模拟结果相符合;并运用微纳机械加工技术制造出该器件。该器件将加热电阻器、压阻式传感器和硅基针尖集成于在同一超薄微细悬臂梁,通过楔形开孔的机械切断,避免了加热电阻器高温处的PN结在高温下失去电隔离作用。室温下测得该器件加热电阻器的阻值为500～600Ω,压阻式传感器的力敏电阻器的阻值为6～8kΩ。

Structure of the NEMS electro-thermal probe array integrated with piezoresistive sensor and its fundmental working principle have been illustrated and the structure parameters have been gained by theoretic calculation,it is agreeable well to the ANSYS simulation result. Finally, the component has been fabricated by advanced silicon bulk micromachining technology. The thermal resistor is integrated with both the piezoresistive sensor and the silicon tip on a thin cantilever.In order to avoid the losing electrical insulation of PN junction on the heater at high temperature, a wedge hole is formed on the fore-part of cantilever. Tested resistance values of the heating resistor and the piezoresistive sensor are 500～600Ω and 6～8kΩ,respectively.