摘要
介绍了微电子机械系统中的关键执行部件——超微电机,包括静电型微电机、电磁型微电机、超声波微电机等。分析了原理、分类及各自的特点,概述了超微电机的研制发展过程,综述了微电子机械系统中微电机的发展趋势。
Micro motors, one of the important devices in the micro electromechanical system, are discussed, including electrostatic micro-motors, electromagnetic micro-motors and ultrasonic micro-motors. The principles, classification and characteristics are analyzed and the developing trend is reviewed.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2003年第12期46-48,共3页
Electronic Components And Materials