采用低F工艺在低碳残留La_2Zr_2O_7/CeO_2缓冲层上沉积YBCO膜

Fabrication of YBCO Film on the La_2Zr_2O_7/ CeO_2 Buffer Layer with Little Residual Carbon by a Low F Content Deposition Process

采用化学溶液法在双轴织构的Ni W基带上制备了双层膜结构的La2Zr2O7(LZO)/CeO2缓冲层和超导层,在缓冲层沉积过程中通过在退火气氛中混入CO2降低其中的碳残留量,YBCO超导层的沉积则是通过低F工艺进行的.利用X射线衍射(XRD)和扫描电镜(SEM)对所制得样品的织构和表面形貌进行了表征,并测试了样品的电性能.结果表明,少量弱氧化性气体的混入在除去缓冲层中残留碳的同时并没有破坏缓冲层的织构和形貌.而在平整的缓冲层表面沉积的YBCO层显示出了锐利的双轴织构和良好的超导电性,该工艺可以进一步移植到长带制备过程中.

In this paper,the La2Zr2O7( LZO) /CeO2 buffer layer and superconducting layer with bi-layer membrane structure were fabricated on the Ni W baseband of bi-axial texture by the chemical solution method. In the buffer layer deposition process,the carbon residue amongthem was reduced by mixing with CO2 in the annealing atmosphere,and the deposition of YBCO superconducting layer was carried out by the Low F content deposition process. The texture and morphology of the prepared samples were characterized by X ray diffraction( XRD) and scanning electron microscopy( SEM),and the electrical properties of the samples were tested.The result indicates that mixing with a small amount of weakly oxidizing gases did not destroy the texture and morphology of the buffer layer while removing residual carbon in the buffer layer. However,the YBCO layer deposited on the flat surface of the buffer layer showed a sharp biaxial texture and good superconductivity,and this process can be further transplanted into the process of long length baseband preparation.