摘要
采用表面分析仪及电子显微镜等对AlN_xO_y/Cu选择性吸收膜层进行表面形貌、成分分布、深度剖面原子浓度及原子价态的研究,并探讨了膜层组织结构对光学性能的影响。
In this Paper, the surface structure, composition distribution, atomic concentration and valence state along the depth of AlNzOy/Cu selective absorptive film are studied by X-ray surface analysis meter (XSAM) and scanning electron microscope (SEM). The microstructure of the film and its optical performace are discussed.
出处
《太阳能学报》
EI
CAS
CSCD
北大核心
1992年第4期389-393,共5页
Acta Energiae Solaris Sinica
关键词
太阳能
氮氧化铝
吸收膜
结构
AINxOy, selective absorption film, surface structure, optical performace
