Sol-gel法制备Al_2O_3复合膜的EPMA研究

EPMA Study on Alumina Composite Membranes by Sol-gel Process

研究采用 Sol- gel法成功地制备了一种新型的 Al2 O3- Si O2 - Ti O2 - Zr O2 复合陶瓷膜 ,其膜面平整 ,无宏观缺陷。利用电子探针微区分析 (EPMA)重点研究了膜的表面和膜与基体界面的化学成分及微观结构。并分析了修饰物添加剂对膜的形貌和性能的影响。结果表明 Ti O2 、Si O2 、Zr O2 掺杂对 Al2 O3膜起到了良好的修饰作用。

The authors got new Al_2O_3-SiO_2-TiO_2-ZrO_2 composite ceramic membranes by Sol-gel process. There was no crack on the surface of coating. It was stressed the point on the microstructure of membrane and interface between membrane and substrate in this study. There have great effects on alumina membranes with titania, silica and zirconia doped. The structure and characteristics of the membrane and interface between membrane and substrate have been determined by EPMA method.