醋酸锌对氧化铈形貌及抛光性能的影响

Effect of zinc acetate on morphology and polishing properties of cerium oxide

采用简易的水热合成方法,以柠檬酸钠、醋酸锌和硝酸铈为原料制备了氧化铈纳米杆。XRD分析结果表明,制备出的晶体前驱体由非晶相组成。在573 K下煅烧10 h后,二氧化铈前驱体成立方萤石结构的晶体。改变醋酸锌的添加量会改变最终获得的二氧化铈杆状形貌尺寸和抛光性能。随着醋酸锌添加量的增加,微纳米杆二氧化铈晶面的优先生长方向演变成沿直径方向,纳米杆变得越来越粗,平均直径从230 nm增大到370 nm。使用未添加醋酸锌的杆状氧化铈进行抛光时,硅晶片表面存在略微的划伤和长短不一的划痕。随着醋酸锌浓度的增加,硅晶片表面划痕更加明显且有少量的腐蚀坑。

Cerium oxide nanorods are prepared through simple hydrothermal synthesis method with sodium citrate and zinc acetate as raw materials.XRD results show that the prepared crystal precursor consists of amorphous phase.After calcination at 573 K for 10 hours,CeO2 precursor crystallizes to form a cristobalite structure.Changing the addition amount of zinc acetate will cause the shape and polishing performance of final CeO2 rod to change.As the addition amount of zinc acetate increases,the preferential growth direction and velocity of the micro-nano-CeO2 crystal face gradually evolves into a diameter direction,so that the rod becomes thicker and thicker,with an average diameter increasing to 380 nm from 230 nm.The surface of the silicon wafer will suffer slight scratches and various lengths of scores when rod cerium oxide without adding zinc acetate is used to polish silicon wafer.As the concentration of zinc acetate increases,scratches on the surface of silicon wafer will become more significant and there will be a small amount of corrosion pits on the surface.The growth and wear mechanism of the synthesized CeO2 nanorods is also discussed.