摘要
给出了在非定步长算法中使相位测量误差达到最小的一个最佳的相移步长。匹配范围:180°<Φ1<270°,90°≤Φ2≤180°;指出了即使相移步长不在此匹配范围内,应用该算法的相位测量精度亦能达到μm级。同时对非定步长算法与Stoilov算法进行了误差比较分析。经分析表明,该算法的性能优于Stoilov算法。
The best matched rang of the phase-shift steps in the undecided steps algorithm can minimize the measuring errors.The best matched rang was proposed:180°<Φ1<270°,90°≤Φ2≤180°;And points out the fact that the measuring precision claculated by this algorithm is up to the micron level even if the shift steps are not in the rang.The errors between the undecied steps algorithm and Stoilov algorithm were compared.The result shows that this algorithm is superior to the Stoilov algorithm.
出处
《光电子.激光》
EI
CAS
CSCD
北大核心
2003年第12期1324-1327,共4页
Journal of Optoelectronics·Laser
关键词
非定步长算法
相移
投影栅
测量精度
phase-shift
Stoilov algorithm
projected grating
error analyses