基于参数自适应PID控制算法激光准直系统的研制

Developing of a Laser Beam Alignment System Based on Parameters Self-adaptive PID Control Algorithm

提出并研制了一种基于参数自适应比例、积分和微分(PID)控制算法的激光准直控制系统,从根本上解决了传统PID控制方法的存在的精度低、实时性差等不足。在50min内,x向(水平方向)的角漂移量为22nm/150mm,y向(垂直方向)的角漂移量为15nm/150nm;x向的平漂移量为26nm/150nm,y向平漂移量为28nm/150nm。实验证明:采用参数自适应PID控制算法,激光准直系统的准值精度和鲁棒性得到显著提高。

A laser beam alignment system based on parameters self-adaptive proportional, integral and differential (PID) control algorithm was presented. It thoroughly solves the shortages of low accuracy, low frequency-response of traditional PID control method. In 50 minutes, the angle excursion of emergent beam in x direction (horizon direction) is 22 nm/150 nm, in y direction (vertical direction) is 15 nm/150 mm; the displacement excursion of emergent beam in x direction is 26 nm/150 mm, in y direction is 28 nm/150 mm. Experiments shows that accuracy and robustness of the laser alignment system are greatly improved by employing parameters self-adaptive PID control algorithm.