摩擦取向膜表面液晶薄层厚度的研究

Thickness Evaluation of Surface Rubbed Liquid Crystal Film Grown on Silicon Substrate

基于液晶具有光学单轴晶体的性质 ,结合阿贝折射仪测出了方位折射率 ,利用反射椭偏消光法测量原理解决了在多层介质膜上液晶吸附层厚度测量问题。利用这种方法测量了经过摩擦取向处理的高分子取向膜表面的液晶薄层厚度。实验发现 ,经过不同摩擦强度处理后的取向膜吸附液晶薄层的厚度为 5 4nm± 3nm。

Experimental techniques, with a combination of ellipsometry and Abbe refractometery, were discussed to improve the precision in thickness evaluation of the surface rubbed liquid crystal film grown on silicon substrate. The thickness of the liquid crystal films, the surfaces of which was rubbed with different rubbing strengths, was measured in this technique. The results show that the thickness, 54 nm ± 3 nm, is almost independent of rubbing strength.