磁悬浮转子微陀螺及其悬浮力与稳定性的分析

Micromachined gyroscope of electromagnetic levitating rotor and its analysis of levitating force and stability

磁悬浮转子微陀螺是一种集经典陀螺的工作原理与易实现微加工批量生产的特点于一体,可望得到高准确度的微陀螺。它是基于电磁场原理得以悬浮、旋转以及稳定;以ANSYS5.6有限元分析软件包为工具分析了悬浮线圈中的电流幅值和线圈宽度对悬浮力的影响规律;分析了磁悬浮转子微陀螺的运行稳定性,验证了稳定线圈能使微转子稳定运行,从而磁悬浮转子微陀螺的设计得以论证。进行的数值计算为优化微陀螺的结构设计提供依据。

The micromachined gyroscope of electromagnetic levitating rotor has the working principle of traditional gyroscope and the characteristic of suitability for batch-produce through the micromachined process, and the micromachined gyroscope with high accuracy is hopeful to be obtained. Based on electromagnetic field (theory,) micromachined gyroscope of electromagnetic levitating rotor can be levitated, rotated and stabilized. (Using) ANSYS5.6, the influence of current amplitude and planar coil width on levitating force is analyzed. The (working) stability of the micromachined gyroscope is analyzed, and that the stability coil makes the micro-gyroscope (work) stably is verified. The numerical calculation provides foundation for optimizing the structure design of the micromachined gyroscope.