摘要
扼要介绍高气压电场电离气体研究现状及等离子体化学研究进展,着重研讨当前等离子体工程存在问题,以便解决向高密集的反应气体传递化学反应需要的高能量(>12eV).为此提出了强电场电离气体方法,采用特种工艺加工电介质薄层,在介质阻挡放电的间隙形成了强电离放电,气体电离电场强度大于100kV/cm以上,电子具有平均能量大于10eV,占空比大于0.5%.它成功地解决了等离子体工程中现存的问题,实现了在分子层次上按预先设计物质模型加工新物质、新材料.文中介绍了高气压强电离放电在等离子体工程的成功应用事例.
In this paper, the research status of gas ionization at high pressure and the advance of plasma chemistry are compendiously presented, and the problems in the present plasma technology are discussed in order to solve the requisite high energy(>12 eV) transferred to the high-density reactor gas. Therefore the method of strong ionization discharge is presented. With the dielectric made by special process technology, the strong ionization discharge is formed, in which discharge gap of the electric is over 100 kV/cm and the average electron energy it more than 10 eV and the duty ratio is higher than 0.5%. With this method the present problems of plasma technology are solved successfully and the recombination of new substance or polymerization can be realized at the molewlar scale. At the same time the successful application examples of plasma technology is presented.
出处
《中原工学院学报》
CAS
2003年第B08期5-9,共5页
Journal of Zhongyuan University of Technology
关键词
强电离放电
非平衡等离子体
高能电子
化学定向反应
介质阻挡放电
强电场
strong ionization discharge
non-equilibrium plasma at high-pressure
high-energy electron
chemical oriented reaction.
