FeSiAl合金磁性薄膜的制备与研究

Preparation and Investigation of Magnetic Sendust Alloy Thin Films

用X-射线衍射,扫描电子显微镜研究了直流磁控溅射法制备的FeSiAl合金薄膜。用振动样品磁强计测量了薄膜的磁性能。主要研究了热处理对薄膜的结构和磁性能的影响。结果表明随着退火温度的升高,薄膜的X衍射峰(220)逐步尖锐化,矫顽力不断减小,磁性能有了较大的提高。

The magnetic FeSiAl films prepared by DC magnetron sputtering have been studied using X ray diffraction and SEM.The magnetic properties of FeSiAl films have been measured by using VSM. It is shown that with advancing annealing temperature, the peak of preferred (220) orientation is higher and sharper, the coercivity of the film is smaller. The magnetic properties are better after annealing.