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扫描探针显微镜在激光纳米加工技术上的应用和进展 被引量：2

Current Development of Laser Nanomachining Assisted by Scanning Probe Microscopy
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摘要 综述了扫描探针显微镜在激光纳米加工技术上应用的最新进展,介绍了纳米结构的形成机理。 This paper summarized the current development of laser-assisted scanning probe microscopy in nanomachining, and the mechanisms of forming nanometer structure are introduced.
作者 徐世珍 程兆谷 徐至展
机构地区 中国科学院上海光学精密机械研究所
出处 《激光与光电子学进展》 CSCD 2004年第1期50-53,共4页 Laser & Optoelectronics Progress
关键词 扫描探针显微镜 超短脉冲激光 纳米加工 纳米结构 ultra-short pulse laser scanning probe microscopy nanomachining
分类号 TB383 [一般工业技术—材料科学与工程] TN249 [电子电信—物理电子学]
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参考文献3

  • 1朱星.近场光学与近场光学显微镜[J].北京大学学报（自然科学版）,1997,33(3):394-407. 被引量：26
  • 2P.I. Geshev,F. Demming,J. Jersch,K. Dickmann. Calculation of the temperature distribution on laser-illuminated scanning probe tips[J] 2000,Applied Physics B Lasers and Optics(1):91～97
  • 3J. Jersch,F. Demming,L.J. Hildenhagen,K. Dickmann. Field enhancement of optical radiation in the nearfield of scanning probe microscope tips[J] 1998,Applied Physics A Materials Science & Processing(1):29～34

二级参考文献9

共引文献25

同被引文献19

  • 1Zhao Qingliang,Sun Tao,Dong Shen,Liang Yingchun (School of Mechanical Engineering,Harbin Institute of Technology).MICRO/NANO-MACHINING ON SILICON SURFACE WITH A MODIFIED ATOMIC FORCE MICROSCOPE[J].Chinese Journal of Mechanical Engineering,2001,14(3):207-211. 被引量：4
  • 2NOVOTNY L, POHL D W, HECHT B. Scanning. Near-field Optical Probe with Ultrasmall Spot Size [J]. Opt. Lett. (S0146-9592), 1995, 20(9): 970-972.
  • 3BEAULAC R, SCHNEIDER L, ARCHER P I, et al. Light-induced Spontaneous Magnetization in Doped Colloidal Quantum Dots [J]. Science (S0036-8075), 2009, 325: 973-976.
  • 4TIAN X J, LIU L Q, JIAO N D, et al. 3D Nano Forces Sensing for an AFM Based Nanomanipulator [C]//Proeeedings of International ConfereneeonlnformationAcquisition, Hefei, China, June21-25, 2004. Hefei: ICIA, 2004: 208-212.
  • 5ZHANG G, ZHU Z, LI Y, et al. Numerical Analysis of Near-field Optical Trapping Using Tapered Fiber Probe [J]. Proceedings of SPIE(S0277-786X), 2000, 4082: 321-328.
  • 6VESPERINAS M N, CHAUMET P C, RAHMANI A. Near-field Photonic Forces [J]. Phil. Trans. R. Soc. Land. A. ($1364-503X), 2004, 362: 719-737.
  • 7Foubert P, Vanoppen M, Martin T, et al. Mechanical and Optical Manipulation of Porphyrin Rings at the Submicrometer Scale [J]. Nanoteehnology(S0957-4484), 2000, 11: 16-23.
  • 8NEUMAN K C, BLOCK S M. Optical Trapping [J]. Review of Scientific Instruments (S0034-6748), 2004, 75(9): 2787-2809.
  • 9YEE K S. Numerical Solution of Initial Boundary Value Problems Involving Maxwell's Equations in Isotropic Media [J]. IEEE Trans.Ant. Propagat(S0018-926X), 1996, 14: 302-307.
  • 10CHRISTENSEN D A. Analysis of Near-field Tip Patterns Including Object Interaction Using Finite Difference Time Domain Calculations [J]. Ultramicroscopy(S0304-3991), 1995, 57: 189-195.

引证文献2

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激光与光电子学进展
2004年 第1期

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