多孔硅制备中醇对形貌的影响

Morphologies of porous silicon etched by the electrolyte containing alcohols

实验研究了无光照情况下多孔硅制备中不同单羟基正醇对形貌的影响。实验结果表明,随着醇碳链的增长,多孔硅孔密度减小,枝杈变长,枝杈的尖端变得尖锐。在孔的生长过程中,十字枝杈首先沿着晶格方向快速生长,然后晶格方向的生长速率减小,而非晶格方向则持续生长直到空穴耗尽。本实验增进了对硅溶解动力学中醇作用机理的理解。

Several-Porous-Silicon(PS)-films-with-macropores-are-fabricated-by-electrochemical-etching-method-with-different-monohydric-alcohol-additives-without-the-help-of-illumination.-The-morphologies-of-PS-films-are-investigated-systematically.-Experimental-results-show-that-as-the-increase-of-the-order-of-alcohols,-the-pore-size-of-the-PS-increases,-the-pore-density-decreases,-and-the-tip-of-crossed-pore-becomes-sharper.-The-etching-speed-is-fast-in-the-direction-of-lattice-orientation-at-the-beginning,-but-it-gradually-slows-down-in-the-etching-process.-While-the-etching-in-the-direction-of-amorphous-orientation-keeps-constant,-as-a-result,-the-pore-shape-is-crossed-at-the-beginning-and-it-is-gradually-plumped-until-the-holes-exhausted.-The-experimental-results-obtained-in-this-study-highlight-the-role-of-alcohols-in-the-dissolution-kinetics-of-the-silicon,-which-has-a-direct-impact-on-the-pore-growth-process.