太赫兹用石英基板微带电路制作工艺技术

Process of quartz board microstrip circuit for terahertz

随着卫星应用频段提高到毫米波甚至太赫兹频段,常规陶瓷基材在损耗、表面状态上的不足已非常突出,石英基材将成为星载微波电路板的首选。但由于石英基材自身的特点以及高频段应用的特殊要求,石英基材微带电路的制作技术在国内还不成熟。文章通过对石英基板材料特性、工艺流程、关键工艺技术进行分析,提出了电路制作应注意的技术要领,以及工艺难点的解决方法。

With the satellite applications from millimeter wave to Thz band, the disadvantages of conventional ceramic substrate in loss and the surface state have become very prominent. Quartz substrate will be the first choice of the microwave circuit board for space. Due to the characteristics of quartz substrate and the special requirements in high frequency applications, the microstrip circuit process engineering of quartz substrate is not yet mature in domestic country. The quartz material properties, technological process and key technologies are analyzed, and the essentials of circuit production technology that should be paid attention to are proposed as well as the solutions to the technology bottlenecks.