微电子-机械系统传感器及其应用

Microelectro-Mechanic System sensor and its application.

微电子-机械系统(Microelectro-mechanical system)MEMS,或日微机电系统传感技术,已逐步应用于地球物理勘探领域。利用MEMS技术开发的新一代全数字地震传感器,其输出从直流到千赫兹范围内(如1kHz),均呈现加速度检波器的特性,且具有极低的固有噪声和畸变、直接的数字输出、高的矢量保真度和良好的低频响应。文章着重介绍MEMS的基本加工原理,基本电原理以及MEMS芯片使用安装的注意事项。

Microelectro-Mechanic System' (MEMS) or micromechano-electronic system sensor technique has been gradually applied to geophysical exploration. Using MEMS technique to develop new generation of total-digital seismic sensor, the output current is characterized by acceleration detector up to KHz-level (for instance, 1kHz) and has advantages of extremely low inherent noise and distortion, direct numeric output, high vector hi-fi and good low-frequency response. The article emphatically introduced the basic working principle and electrical principle as well as the matters needing attention in using and installing MEMS core.