摘要
Hexagonal AIN films have been obtained by arc ion plating at different negative biases. X-ray diffraction and scanningelectron microscopy results show that AIN films with smooth surfaces and (002) preferred orientation are obtainedat low biases, whereas those with coarse surfaces and (100) preferred orientation are obtained at high biases. Theformation mechanism of AIN is analyzed and the experiment results are discussed. The effect of bias on adhesionstrength has also been examined.
Hexagonal AIN films have been obtained by arc ion plating at different negative biases. X-ray diffraction and scanningelectron microscopy results show that AIN films with smooth surfaces and (002) preferred orientation are obtainedat low biases, whereas those with coarse surfaces and (100) preferred orientation are obtained at high biases. Theformation mechanism of AIN is analyzed and the experiment results are discussed. The effect of bias on adhesionstrength has also been examined.
作者
Meidong HUANG, Chunyan LU, Bing WANG, Chao SUN, Rongfang HUANG and Lishi WENInstitute of Metal Research, Chinese Academy of Science, Shenyang 110016, ChinaGuoqiang LIN and Chuang DONGState Key Laboratory for Materials Modification by Laser, Ion, and Electron Beams, Dalian University of Technology, Dalian 116024, China
