Y型声表面波质量传感器

Y-Type Surface Acoustic Wave Mass Sensor

报道了在 12 8°Y切割X传播方向的LiNbO3基片上设计并研制的中心频率为 12 2MHz的Y型双声路质量传感器 ,它具有一个参考声路臂和一个测量声路臂 ,每声路中有一个采用光刻工艺精确定位的质量沉积区。本文阐述了质量沉积效应的原理、器件的设计方法。采用振荡的方式对器件的性能进行测试。测试结果表明 :该器件的两声路频谱对称性良好 ,并且有良好的相对温度系数 ,仅为 12Hz/℃左右。器件的质量沉积效应灵敏度约为 3 6GHz·cm2 /g 。

A new Y-type SAW mass sensor with center frequency 122 MHz fabricated on a substrate of LiNbO-3(128° Y and X-propagating) is reported. This sensor has one acoustic path for reference and another acoustic path for measurement. There is a mass loading area located accurately in each acoustic path and fabricated by photolithography technology.The theory of mass-loading effect and design rules of the device have been explained. The device has been tested by mode of oscillation. The results show that the Y-type mass sensor has a good symmetry between frequency responses of each path and a very low relative temperature coefficient (only about 12 Hz/℃). Mass loading effect sensitivity is about 3.6 GHz·cm 2/g with a good linearity.