激光烧结纳米ZnO气敏传感器制备及其气敏特性研究

Laser Sintering ZnO nanoparticals Gas Sensors and Their Gas Sensitivities

以激光 -感应复合加热法制备的纳米ZnO为原料 ,用激光烧结法制成的气敏传感元件 ,对乙醇、丙酮等五种挥发性有机化合物的敏感性进行了测定 ,同时又对所制成的传感元件作了SEM分析。实验表明 ,采用激光烧结的纳米ZnO较之电炉烧结的敏感度高 ,孔洞细小、孔隙率增多 ;且随着激光加工功率的提高 。

ZnO nanoparticals were produced by renovated hybrid induction and laser heating(HILH).Based on this raw material, ZnO nanoparticals gas sensors were prepared by laser sintering. Their gas sensitivities to volatile organic compounds (VOCs), such as benzene, acetone, toluene, xylene and ethanol, were measured. Their morphological characteristics and phase microstructure were also investigated by SEM. The laser sintering ZnO nanoparticals gas sensors had smaller cavities, higher cavity density, which caused their higher sensitivity. The temperature to maximum sensitivities reduces with the increasing of laser processing power.