VCSEL稳态热特性分析

Analysis of Stable Heat Characteristcs in VCSEL

使用数值方法对氧化层限制型垂直腔面发射激光器(VCSEL)内部稳态热场分布进行了计算,结果显示其分布形式取决于DBR区热导率及其与高阻限制层热导率的差异,并指出在限制层孔径变化及外加电极电压变化时对热场分布的影响;器件中温度最高的部分处于中心氧化限制层附近。有源层中温度沿径向的分布情况表明,在氧化限制孔径下方形成明显的温度台阶是导致器件有源层中产生折射率台阶的主要原因。

Stable heat field distribution in dielectric apertured vertical-cavity surface-emitting laser(VCSEL) was analyzed by using numerical calculation.The results show that the variation of heat field distribution is mostly affected by the thermal conductive ability of DBR region and the difference of thermal conductive ability of DBR region and dielectric confinement layer,the highest temperature center is near dielectric aperture of VCSEL,and the temperature distribution along active layer appears evidence temperature step (plateau just below the dielectric aperature) which helps to form the refractive index step in active layer.