激光光束特定方向准直方法与技术

Laser Beam Collimation Method and Technology in Given Beam Direction

基于光束漂移量反馈通过PZT驱动的微角度控制,实时动态检测和控制激光光束特定方向的平漂量和角漂量,以达到出射光束特定方向的高稳定性。准直系统中对光束平漂量和角漂量进行了分离检测,并各自构成了平漂量和角漂量反馈控制执行系统,减小了平漂量和角漂量反馈控制中的相互耦合,提高了准直精度及准直效率。实验表明,该方法特定方向准直精度可达5×10-8rad。

In this method, displacement and angle excursions of laser beam from given direction was measured and controlled dynamically in real time through micro-angle measuring and micro-angle controlling systems based on piezoelectric driving, in the collimation system, displacement excursion and angle excursions of laser beam is measured separately and each of them has a independent feedback control system to restrain the excursion respectively, so the coupling in feedback control between displacement excursion and angle excursion is decreased so the collimation precision and collimation efficiency are improved. Experiments prove that the collimation precision of laser beam can reach 5×10-8 rad.