低电压驱动微机械1×8光开关的动态分析

Dynamic Analysis of Low Voltage Micro-machining Based 1×8 Optical Switch

研制了一种小体积、低成本及可扩展的低电压1×8微机械电子系统(MEMS)光开关。由5V电压驱动电磁机构动作,带动微反射镜绕直径100μm转轴转动,实现开关的状态切换。开关时间2ms,插入损耗<0.8dB,具有断电自锁功能。器件制作采用微细电火花加工(EDM)技术。应用有限元方法进行了器件开关时间的理论分析,器件的结构优化设计,并与实测结果进行了比较。

A 1×8 fiber optic switch based on precision electrical discharge machining (EDM) technique, which allowed fast switch (2 ms),low insertion loss (0.8 dB), return loss (≥49 dB) and wide bandwidth, was reported. Each reflection cell in the switch consists of an electromagnetically actuated gold-coated silicon mirror rotating around a 100 μm diameter shaft and a miniature 5 V driven coil. The switch is scalable to 8×8 and allows the realization of high capacity cross-connects. A detailed switching dynamic analysis was conducted by utilizing FEA software ANSYS. The calculated switch time as a function of driving voltage was compared with the measurement and a reasonably good agreement was obtained.