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基于几何模型的表面微加工MEMS工艺层模型生成 被引量：3

Generating Layered Model from Geometric Model for Surface Micro-Machined MEMS
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摘要 现有微机电系统设计中所存在的一个重要问题是,设计人员需要通过工艺和版图设计来完成几何设计,因此难以用于复杂器件的设计。研究了表面微加工MEMS几何模型到工艺层模型的自动转化,旨在实现MEMS器件几何设计和工艺规划的分离,给出了表面微机械加工的工艺特征的定义和分类方法,并简要介绍了工艺特征的自动识别过程,重点研究了基于工艺特征模型的工艺层模型自动生成方法。最后给出了试验结果。 One problem with traditional MEMS design methodology is that it is not a structured method. In this paper, a method for automatically generating the layered model from its geometric model is proposed as the basis of the structured MEMS design. The method is mainly composed of two parts: definition and automated recognition of the process features for surface micro-machined MEMS; automated generation of the layered model based on the recognized process features. The method aims at enabling designers to concentrate on the creative design activity without considering the tedious fabrication process.
作者 李建华 高曙明 刘玉生
机构地区 浙江大学CAD&CG国家重点实验室
出处 《计算机集成制造系统-CIMS》 EI CSCD 北大核心 2003年第12期1126-1131,共6页
基金 国家863/CIMS主题资助项目(2001AA411310) 教育部跨世纪优秀人才培养计划资助项目。~~
关键词 微机电系统 几何模型 表面微加工 MEMS 工艺层模型 process feature layered model MEMS CAD
分类号 TH-39 [机械工程]
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参考文献9

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同被引文献18

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引证文献3

二级引证文献3

计算机集成制造系统-CIMS
2003年 第12期

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